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 SPV Lifetime Monitor
Prime wafers with suitable for use as contamination process monitors using SPV/Lifetime
measurement techniques.
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Dia |
|
5 |
6 |
8 |
12 |
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Product Code |
|
5S |
6S |
8S |
12S |
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Type |
|
p-boron |
p-boron |
p-boron |
p-boron |
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Orient |
|
<100> |
<100> |
<100> |
<100> |
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Res |
|
8.0 - 20.0 |
8.0 - 20.0 |
8.0 - 20.0 |
8.0 - 20.0 |
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Surface Metals |
|
Fe <= 2E10 |
Fe <= 2E10 |
Fe <= 2E10 |
Fe <= 2E10 |
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Global Flatness |
TTV |
** |
** |
** |
** |
| TIR |
** |
** |
** |
** |
| FPD |
** |
** |
** |
** |
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Backside |
|
Etched or WSB |
Etched or WSB |
Etched or WSB |
Etched or WSB |
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Bow |
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Warp |
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Site Flatness (20X20) max site |
SBIR |
** |
** |
** |
** |
| SBID |
** |
** |
** |
** |
| SFLR |
** |
** |
** |
** |
| SFLD |
** |
** |
** |
** |
| SFQR |
** |
** |
** |
** |
| SFQD |
** |
** |
** |
** |
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LPD USL |
< 0.12 |
|
|
|
|
| <0.13 |
|
264 |
390 |
TBD |
| <0.16 |
|
19 |
90 |
TBD |
| <0.20 |
|
12 |
25 |
TBD |
| <0.30 |
|
6 |
13 |
TBD |
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Epi Thickness |
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Epi Res |
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Epi Stacking Faults |
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Laser Mark |
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** |
** |
** |
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** Specifications subject to availability
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