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 EPI Wafer
Prime epitaxial wafers from SEH suitable for CMOS and related applications.
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Dia |
|
5 |
6 |
8 |
12 |
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Product Code |
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5P/PP0E |
6P/PP0E |
8P/PP0E |
12P/PP0E |
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Type |
|
p-boron |
p-boron |
p-boron |
p-boron |
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Orient |
|
<100> |
<100> |
<100> |
<100> |
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Res |
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Surface Metals |
|
<= 5 E10 |
<= 5 E10 |
<= 5 E10 |
<= 5 E10 |
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Global Flatness |
TTV |
<5.4 |
<5.5 |
<7.3 |
TBD |
| TIR |
<1.7 |
<3.5 |
<4.8 |
TBD |
| FPD |
<1.0 |
<2.5 |
<3.4 |
TBD |
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Backside |
|
** |
** |
** |
** |
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Bow |
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Warp |
|
55 |
60 |
50 |
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Site Flatness (20X20) max site |
SBIR |
< 2.0 |
|
<.70 |
TBD |
| SBID |
** |
|
<.5 |
TBD |
| SFLR |
** |
** |
** |
TBD |
| SFLD |
** |
** |
** |
TBD |
| SFQR |
|
** |
<.60 |
TBD |
| SFQD |
|
<.90 |
<.50 |
TBD |
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LPD USL |
< 0.12 |
|
|
|
|
| <0.13 |
137 |
165 |
165 |
TBD |
| <0.16 |
83 |
110 |
110 |
TBD |
| <0.20 |
44 |
55 |
55 |
TBD |
| <0.30 |
33 |
33 |
33 |
TBD |
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Epi Thickness |
|
2.0 - 30.0 |
2.0 - 30.0 |
2.0 - 30.0 |
2.0 - 30.0 |
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Epi Res |
|
2.0 - 30.0 |
2.0 - 30.0 |
2.0 - 30.0 |
2.0 - 30.0 |
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Epi Stacking Faults |
|
25 |
35 |
35 |
TBD |
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Laser Mark |
|
** |
** |
** |
** |
** Specifications subject to availability.
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